Microstructure and electrical properties of BaTiO3 thin films by modified CSD
0.3 M BaTiO3 (BT) precursor solution was prepared by the modified CSD, in which partially hydrolyzed Ti-alkoxide and Ba precursor solution was reacted in iced water bath to prepare the highly polymerized BT precursor solution. The BT precursor solution was spin-coated on a Pt/Ti/SiO2/Si substrate wi...
| 種別: | 電子-学術雑誌論文 |
|---|---|
| 言語: |
英語
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| 出版事項: |
The Ceramic Society of Japan
2011-06
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| ISSN: | 18820743 13486535 |
| 主題: | |
| オンライン･アクセス: | SURE: 静岡大学学術リポジトリ フリー |
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