High density plasma sources : design, physics and performance /
| 種別: | 図書 |
|---|---|
| 言語: |
英語
|
| 出版事項: |
Park Ridge, NJ :
Noyes Publications,
c1995
|
| シリーズ: | Materials science and process technology series
|
| ISBN: | 0815513771 |
| 主題: |
| 記述事項: | Includes bibliographical references and index |
|---|---|
| 形態事項: | xx, 445 p. ; 25 cm |